SiO2 in Si Microdevices (Springer Series in Materials Science)
Ungelesenes vollständiges Exemplar in sehr gutem Zustand mit leichten Lagerspuren Rechnung mit MwSt Bestellungen bis 15 Uhr werden am gleichen Werktag verschickt______Electronic systems and digital computers are an indispensable element of modern multimedia technologies and the Internet society But their explosive advance would not have been possible without the extraordinary progress in VLSI technology using high-quality SiO2 This volume addresses the thin gate oxides involved in the individual processes in fabrication e g the growth cleaning and thermal oxidation of silicon metal interconnect formation and photolithography It describes new methods for observing defects in SiO2 as well as novel approaches to eliminating such defects The book will be a valuable resource for all materials scientists and engineers seeking to further advance the quality of silicon microdevices
Unser bisheriger Preis:ORGPRICE: 101,60 €
Jetzt 19,95 €* Gebundene Ausgabe
Beschreibung:
Electronic systems and digital computers are indispensable elements of modern multimedia technologies and the Internet society. But their explosive advance would not have been possible without the extraordinary progress in VLSI technology using high-quality SiO2. This volume addresses the thin gate oxides involved in the individual processes in fabrication, e.g. the growth, cleaning and thermal oxidation of silicon, metal interconnect formation, and photolithography. It describes new methods for observing defects in SiO2 as well as novel approaches to eliminating such defects. The book will be a valuable resource for all materials scientists and engineers seeking to further advance the quality of silicon microdevices.