Novel Optical Technologies for Nanofabrication

This book introduces novel optical technologies for micro/nanofabrication that are different from the conventional fabrication methods. It provides a wealth of successful applications based on novel optical fabrication technologies.

Novel Optical Technologies for Nanofabrication describes recent advances made in micro/nanofabrication with super-resolution laser technologies, which are based on the latest research findings in the authors’ groups. It focuses on new  techniques and methods as well as applications and development trends  in laser nanofabrication, including super-resolution laser direct writing,  surface structures composed of laser path-guided wrinkle, three-dimensional laser nanofabrication based on  two-photon absorption, and nanofabrication by laser interference and surface plasmon polaritons.

This book serves as a reference for academic researchers, engineers, technical professionals and graduate students in the fields of micro/nanotechnology, thin film materials, super-resolution optics and laser techniques.

Qian Liu is a Professor at Laboratory for Nanodevice, National Center for Nanoscience and Technology, China.

Xuanming Duan is a Professor at the Key Laboratory of Functional Crystals and Laser Technology, Technical Institute of Physics and Chemistry, Chinese Academy of Sciences, China

Changsi Peng is a Professor at the Institute of Information Optical Engineering, Soochow University, China.

Introduction.- Super-resolution Laser Direct Writing and Its Applications.- Laser path-guided wrinkle structures.- Laser Micro/Nanofabrication and Applications Based on Multiphoton Process.- Laser Interference Nano-Fabrication.- Super-Resolution Patterning and Photolithography Based on Surface Plasmon Polaritons.- Mass production of large-format micro/nano-structure based optical devices.