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Transient Properties of HiPIMS Discharges
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Artikel-Nr:
9783639716467
Veröffentl:
2014
Einband:
Paperback
Erscheinungsdatum:
19.05.2014
Seiten:
212
Autor:
Anurag Mishra
Gewicht:
334 g
Format:
220x150x14 mm
Sprache:
Englisch
Beschreibung:
Dr. Anurag Mishra is a senior researcher in Advanced Material Science and Engineering, Sungkyunkwan University, South Korea. He has his PhD from The University of Liverpool, United Kingdom. His work is on transient phenomena in High Power Impulse Magnetron Sputtering (HiPIMS) discharges. Dr. Mishra s current research interests are Large
HiPIMS (High Power Impulse Magnetron Sputtering) is a relatively new highly ionized sputtering technique used to deposit engineering quality thin films, with the advantage that the deposition flux can be guided to the substrate through the electrical biasing. As the technique is on the verge of being adopted by the industries, it is necessary to understand its physics very well so that thin films with tailored properties can be deposited. Therefore, time-resolved diagnostic studies have been carried out to get better physical insight of the HiPIMS processes. This book also provides information of lower deposition rates in HiPIMS discharge and suggests its solutions.