Handbook of Optical Systems 2

Wolfgang Singer Wolfgang Singer was born in 1964 and studied Physics at the University of Erlangen. He received his Ph.D. at the Institute of Applied Optics in 1995 with a thesis on microoptics, propagation theory and tomography. He spent his post doctorate at the Institute de Microtechnique in Neuchatel, where he developed diffractive diffusors for DUV illumination systems. From 1996 to 1998, he was assistant at the Institute of Applied Optics at the University of Stuttgart. Since 1998, he has been with Carl Zeiss SMT AG, working in the department of optical design and simulation for lithographic optics. His work includes tolerancing of objectives and the design of illumination systems of EUV systems. He became principal scientist and was engaged at the scientific training programme at Carl Zeiss. His special interests are imaging theory and partial coherence, and he has written his own simulation software. He holds 50 patents and has published about 30 papers and contributions to textbooks. Michael Totzeck Michael Totzeck was born in 1961. He received his diploma degree in Physics in 1987 and his Ph.D. in 1989, both from the Technical University of Berlin, where he also did his habilitation in 1995. In 1991 he was awarded the Carl-Ramsauer-Award of the AEG AG for his Ph.D thesis on near field diffraction. From 1995 to 2002, he headed a group on high resolution microscopy at the Institute of Applied Optics in Stuttgart, working by experimental, theoretical and numerical means on optical metrology at the resolution limit. He has been with the Carl Zeiss SMT AG since 2002, working in the department for optical design. His current research topic is electromagnetic imaging with high-NA optical systems. He has published 40 papers on diffraction theory, near-field optics, high-resolution microscopy, interferometry, metrology, optical singularities, polarization-optics and physics education. Herbert Gross Herbert Gross was born in 1955. He studied Physics at the University of Stuttgart and joined Carl Zeiss in 1982. Since then he has been working in the department of optical design. His special areas of interest are the development of simulation methods, optical design software and algorithms, the modelling of laser systems and simulation of problems in physical optics, and the tolerancing and the measurement of optical systems. Since 1995, he has been heading the central optical design department at Zeiss. He served as a lecturer at the University of Applied Sciences at Aalen and at the University of Lausanne, and gave seminars for the Photonics Net of Baden Württemberg as well as several company internal courses. In 1995, he received his PhD at the University of Stuttgart on a work on the modelling of laser beam propagation in the partial coherent region. He has published several papers and has given many talks at conferences.

Herbert Gross, born in 1955, joined Carl Zeiss in 1982 after finishing his physics degree as specialist for optical design. Since 1995 he has been working as head of the department of optical design, while also teaching as a lecturer in Aalen and Lausanne.
The new handbook is an intuitive, didactically elegant approach to the subject of optical systems and is not competed by any other work on the market. The selected board of authors, all reputed industrial experts, guarantee the timeliness of the well coordinated, coherent chapters.
The second volume presents a more rigorous physical description of the image formation in optical systems on the basis of first principles. Starting with wave equation and the theory of diffraction, readers are introduced in detail to the Fourier theory of optics, since this is a necessary assumption for an understanding of the finite resolution of optical systems, the basic optical quality criteria, the imaging in three dimensions, the influence of the illumination and the coherence and polarization properties of the light source. In particular, the connection between the geometrical and the wave optical models are explained and readers are able to understand the well-known simulation algorithms used in the calculation of the exact properties of modern optical systems.

Optical systems are used in a wide range of technical applications (e.g. viewing devices, lens systems) and industrial manufacturing (e.g. , semiconductor wafer probing). Yet few of the existing texts provide a coherent balance of theory along with the specifics of practical design and manufacturing of systems.

VOLUME 2.
Introduction.

17. The Wave Equation.

18. Scalar Diffraction.

19. Interference and Coherence.

20. The Geometrical Optical Description and Incoherent Imaging.

21. The Abbe Theory of Imaging.

22. Coherence Theory of Optical Imaging.

23. Three Dimensional Imaging.

24. Image Examples of Selected Objects.

25. Special System Examples and Applications.

26. Polarization.

27. Vector Diffraction.

28. Polarization and Optical Imaging.

A1. Mathematical Appendix.