Precision Motion Control

Applications of precision engineering, generally defined as manufacturing to tolerances that are better than one part in 10⁵, abound and can be found in various semiconductor processes (e.g., lithography, wafer probing, inspection), co-ordinate measuring machines, precision metrology systems (e.g., scanning probe microscopy), and robot/machine tools to carry out micro-assembly (e.g., micro-electro-mechanical systems) and delicate short-wavelength laser processes.

Precision Motion Control (second edition) focuses on enabling technologies for precision engineering - issues of direct importance to be addressed in the overall system design and realization: precision instrumentation and measurement, geometrical calibration and compensation, and motion control. It is a compilation of the most important results and publications from a major project that develops a state-of-the-art, high-speed, ultra-precision robotic system.

The second edition has been extensively edited and rewritten throughout with the following particular areas being expanded or added:

• piezoelectric actuators;

• fine movement control;

• gantry-stage control;

• interpolation of quadrature encoder signals;

• geometrical error modelling for single-, dual- and general-XY-axis stages.

By providing detailed experimental verifications of the material developed, a comprehensive and thorough treatment of the subject matter is provided in a manner that is accessible to a broad base of readers, ranging from academics to practitioners.

Precision Motion Control focuses on enabling technologies for precision engineering - issues of direct importance to be addressed in the overall system design and realization: precision instrumentation and measurement, geometrical calibration and compensation, and motion control. It is a compilation of the most important results and publications from a major project that develops a state-of-the-art, high-speed, ultra-precision robotic system.

The second edition has been edited and rewritten throughout with the following particular areas being expanded or added: - piezoelectric actuators; - fine movement control; - gantry-stage control; - interpolation of quadrature encoder signals; - geometrical error modelling for single-, dual- and general-XY-axis stages.

By providing detailed experimental verifications of the material developed, a comprehensive and thorough treatment of the subject matter, accessible to a broad base of readers, ranging from academics to practitioners, is provided.