Smart Sensor Systems

With contributions from an internationally-renowned group of experts, this book uses a multidisciplinary approach to review recent developments in the field of smart sensor systems, covering important system and design aspects. It examines topics over the whole range of sensor technology from the theory and constraints of basic elements, physics and electronics, up to the level of application-orientated issues. Developed as a complementary volume to Smart Sensor Systems (Wiley 2008), which introduces the basics of smart sensor systems, this volume focuses on emerging sensing technologies and applications, including: State-of-the-art techniques for designing smart sensors and smart sensor systems, including measurement techniques at system level, such as dynamic error correction, calibration, self-calibration and trimming. Circuit design for sensor systems, such as the design of precision instrumentation amplifiers. Impedance sensors, and the associated measurement techniques and electronics, that measure electrical characteristics to derive physical and biomedical parameters, such as blood viscosity or growth of micro-organisms. Complete sensor systems-on-a-chip, such as CMOS optical imagers and microarrays for DNA detection, and the associated circuit and micro-fabrication techniques. Vibratory gyroscopes and the associated electronics, employing mechanical and electrical signal amplification to enable low-power angular-rate sensing. Implantable smart sensors for neural interfacing in bio-medical applications. Smart combinations of energy harvesters and energy-storage devices for autonomous wireless sensors. Smart Sensor Systems: Emerging Technologies and Applications will greatly benefit final-year undergraduate and postgraduate students in the areas of electrical, mechanical and chemical engineering, and physics. Professional engineers and researchers in the microelectronics industry, including microsystem developers, will also find this a thorough and useful volume.

With contributions from an internationally-renowned group ofexperts, this book uses a multidisciplinary approach to reviewrecent developments in the field of smart sensor systems, coveringimportant system and design aspects. It examines topics overthe whole range of sensor technology from the theory andconstraints of basic elements, physics and electronics, up to thelevel of application-orientated issues.Developed as a complementary volume to 'Smart SensorSystems' (Wiley 2008), which introduces the basics of smartsensor systems, this volume focuses on emerging sensingtechnologies and applications, including:* State-of-the-art techniques for designing smart sensors andsmart sensor systems, including measurement techniques at systemlevel, such as dynamic error correction, calibrationself-calibration and trimming.* Circuit design for sensor systems, such as the design ofprecision instrumentation amplifiers.* Impedance sensors, and the associated measurement techniquesand electronics, that measure electrical characteristics to derivephysical and biomedical parameters, such as blood viscosity orgrowth of micro-organisms.* Complete sensor systems-on-a-chip, such as CMOS optical imagersand microarrays for DNA detection, and the associated circuit andmicro-fabrication techniques.* Vibratory gyroscopes and the associated electronics, employingmechanical and electrical signal amplification to enable low-powerangular-rate sensing.* Implantable smart sensors for neural interfacing in bio-medicalapplications.* Smart combinations of energy harvesters and energy-storagedevices for autonomous wireless sensors.Smart Sensor Systems: Emerging Technologies and Applicationswill greatly benefit final-year undergraduate and postgraduatestudents in the areas of electrical, mechanical and chemicalengineering, and physics. Professional engineers and researchers inthe microelectronics industry, including microsystem developerswill also find this a thorough and useful volume.

About the Editors xiList of Contributors xiiiPreface xv1 Smart Sensor Design 1Kofi Makinwa1.1 Introduction 11.2 Smart Sensors 21.3 A Smart Temperature Sensor 51.4 A Smart Wind Sensor 81.5 A Smart Hall Sensor 111.6 Conclusions 142 Calibration and Self-Calibration of Smart Sensors 17Michiel Pertijs2.1 Introduction 172.2 Calibration of Smart Sensors 182.3 Self-Calibration 272.4 Summary and Future Trends 383 Precision Instrumentation Amplifiers 42Johan Huijsing3.1 Introduction 423.2 Applications of Instrumentation Amplifiers 433.3 Three-OpAmp Instrumentation Amplifiers 443.4 Current-Feedback Instrumentation Amplifiers 463.5 Auto-Zero OpAmps and InstAmps 483.6 Chopper OpAmps and InstAmps 523.7 Chopper-Stabilized OpAmps and InstAmps 563.8 Chopper-Stabilized and AZ Chopper OpAmps and InstAmps 623.9 Summary and Future Directions 654 Dedicated Impedance-Sensor Systems 68Gerard Meijer, Xiujun Li, Blagoy Iliev, Gheorghe Pop, Zu-Yao Chang, Stoyan Nihtianov, Zhichao Tan, Ali Heidari and Michiel Pertijs4.1 Introduction 684.2 Capacitive-Sensor Interfaces Employing Square-Wave Excitation Signals 714.3 Dedicated Measurement Systems: Detection of Micro-Organisms 784.4 Dedicated Measurement Systems: Water-Content Measurements 834.5 Dedicated Measurement Systems: A Characterization System for Blood Impedance 894.6 Conclusions 975 Low-Power Vibratory Gyroscope Readout 101Chinwuba Ezekwe and Bernhard Boser5.1 Introduction 1015.2 Power-Efficient Coriolis Sensing 1015.3 Mode Matching 1085.4 Force Feedback 1195.5 Experimental Prototype 1335.6 Summary 1426 Introduction to CMOS-Based DNA Microarrays 145Roland Thewes6.1 Introduction 1456.2 Basic Operation Principle and Application of DNA Microarrays 1466.3 Functionalization 1496.4 CMOS Integration 1506.5 Electrochemical Readout Techniques 1536.6 Further Readout Techniques 1656.7 Remarks on Packaging and Assembly 1696.8 Concluding Remarks and Outlook 1697 CMOS Image Sensors 173Albert Theuwissen7.1 Impact of CMOS Scaling on Image Sensors 1737.2 CMOS Pixel Architectures 1757.3 Photon Shot Noise 1807.4 Analog-to-Digital Converters for CMOS Image Sensors 1817.5 Light Sensitivity 1847.6 Dynamic Range 1867.7 Global Shutter 1877.8 Conclusion 1888 Exploring Smart Sensors for Neural Interfacing 190Tim Denison, Peng Cong and Pedram Afshar8.1 Introduction 1908.2 Technical Considerations for Designing a Dynamic Neural Control System 1928.3 Predicate Therapy Devices Using Smart-Sensors in a Dynamic Control Framework: Lessons Derived from Closed-Loop Cardiac Pacemakers 1958.4 The Application of "Indirect" Smart Sensing Methods: A Case Study of Posture Responsive Spinal Cord Stimulation for Chronic Pain 1988.5 Direct Sensing of Neural States: A Case Study in Smart Sensors for Measurement of Neural States and Enablement of Closed-Loop Neural Systems 2078.6 Future Trends and Opportunities for Smart Sensing in the Nervous System 2319 Micropower Generation: Principles and Applications 237Ruud Vullers, Ziyang Wang, Michael Renaud, Hubregt Visser, Jos Oudenhoven and Valer Pop9.1 Introduction 2379.2 Energy Storage Systems 2409.3 Thermoelectric Energy Harvesting 2469.4 Vibration and Motion Energy Harvesting 2539.5 Far-Field RF Energy Harvesting 2629.6 Photovoltaic 2689.7 Summary and Future Trends 268References 270Index 275