Microstereolithography and Other Fabrication Techniques for 3D Mems

Vijay K. Varadan, Department of Electrical Engineering, University of Arkansas, Fayetteville, Arizona, USAVijay Varadan is an established Wiley author and is currently a Professor in the Department of Electrical Engineering at the University of Arkansas, USA.? Varadan's new book for Wiley, Smart Material Systems and MEMS, is due to publish later this year, and he has previously co-authored Microwave Electronics, RF MEMS and their Applications, Microsensors, MEMS and Smart Devices and Microstereolithography and other Fabrication Techniques for 3D MEMS. He is also Editor-in-Chief of the SPIE's Journal of Smart Materials and Structures.

Eine moderne Einführung in das relativ junge Gebiet der Erzeugung winziger Strukturen, die insbesondere zur Herstellung von Mikrosensoren, Schrittmotoren und miniaturisierten Signalverarbeitungseinheiten benötigt werden. Besprochen wird eine ganze Palette von Mikrofertigungstechniken wie Laserablation und LIGA. Angesprochen werden dabei auch modernste Anwendungsgebiete wie organische Dünnschichttransistoren (TFTs), Antennen, drahtlose Telemetriesysteme und Systeme zur Signalweiterleitung.

This timely and accessible book focusses on microstereolithography and other microfabrication for 3D MEMS. The application of MEMS (micro-electro-mechanical systems) in such diverse fields as intelligent microsensors, data storage, biomedical engineering and wireless communications is booming, but although many MEMS books are available, this book is unique in that most others deal with 2D MEMS. This volume discusses the fundamental principles of microstereolithography for fabrication of 3D MEMS devices, providing an account of recent developments in related microfabrication and combined architecture techniques, and illustrating their application in the engineering and medical fields. It provides a unique and accessible overview of micro-system manufacture using the latest semiconductor processing techniques and coverage of the developmental history of MEMS, micro-sensors, actuators and signal processing units.

Preface.
 
Microelectromechanical Systems.
 
Fundamentals of Polymer Synthesis for MEMS.
 
Stereolithography (SL).
 
Microstereolithography Techniques I-Scanning Method.
Microstereolithography Techniques II-Projection Method.
 
Polymeric MEMS Architecture with Silicon, Metal, and Ceramics.
 
Combined Silicon and Polymeric Structures.
Micromolding.
Applications.
 
Appendix 1: Some Polymers for MEMS.
Appendix 2: An Example of CAD Model and NC Codes for Microstereolithography.
 
Index.

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