RF MEMS and Their Applications

Microelectromechanical systems (MEMS) refer to a collection of micro-sensors and actuators, which can react to environmental change under micro- circuit control. The integration of MEMS into traditional Radio Frequency (RF) circuits has resulted in systems with superior performance levels and lower manufacturing costs. The incorporation of MEMS based fabrication technologies into micro and millimeter wave systems offers viable routes to ICs with MEMS actuators, antennas, switches and transmission lines. The resultant systems operate with an increased bandwidth and increased radiation efficiency and have considerable scope for implementation within the expanding area of wireless personal communication devices. This text provides leading edge coverage of this increasingly important area and highlights the overlapping information requirements of the RF and MEMS research and development communities. * Provides an introduction to micromachining techniques and their use in the fabrication of micro switches, capacitors and inductors * Includes coverage of MEMS devices for wireless and Bluetooth enabled systems Essential reading for RF Circuit design practitioners and researchers requiring an introduction to MEMS technologies, as well as practitioners and researchers in MEMS and silicon technology requiring an introduction to RF circuit design.

Microelectromechanical systems (MEMS) refer to a collection ofmicro-sensors and actuators, which can react to environmentalchange under micro- circuit control. The integration of MEMS intotraditional Radio Frequency (RF) circuits has resulted in systemswith superior performance levels and lower manufacturing costs. Theincorporation of MEMS based fabrication technologies into micro andmillimeter wave systems offers viable routes to ICs with MEMSactuators, antennas, switches and transmission lines. The resultantsystems operate with an increased bandwidth and increased radiationefficiency and have considerable scope for implementation withinthe expanding area of wireless personal communication devices. Thistext provides leading edge coverage of this increasingly importantarea and highlights the overlapping information requirements of theRF and MEMS research and development communities.* Provides an introduction to micromachining techniques and theiruse in the fabrication of micro switches, capacitors andinductors* Includes coverage of MEMS devices for wireless and Bluetoothenabled systemsEssential reading for RF Circuit design practitioners andresearchers requiring an introduction to MEMS technologies, as wellas practitioners and researchers in MEMS and silicon technologyrequiring an introduction to RF circuit design.

Preface.Microelectromechanical Systems (MEMS) and Radio FrequencyMEMS.MEMS Materials and Fabrication Techniques.RF MEMS Switches and Micro Relays.MEMS Inductors and Capacitors.Micromachined RF Filters.Micromachined Phase Shifters.Micromachined Transmission Lines and Components.Micromachined Antennae.Integration and Packaging for RF MEMS Devices.Index.