Micro/Nano Replication

Shinill Kang is a Professor of Mechanical Engineering and the Director of the Nanoreplication and Microoptics National Research Laboratory at Yonsei University. He received his PhD in mechanical engineering from Cornell University, is an author of over one hundred peer-reviewed journal articles, and has given numerous presentations at international conferences.

This book is an introduction to the fundamentals and processes for micro and nano molding for plastic components. In addition to the basics, the book covers applications details and examples. The book helps both students and professionals to understand and work with the growing tools of molding and uses for micro and nano-sized plastic parts.
* Provides a comprehensive presentation on fundamentals and practices of manufacturing for micro / nano sized plastics parts
* Covers a relatively new but fast-growing field that is impacting any industry using plastic parts in their products (electronics, telecommunications, biomedicine)
* Presents fundamentals and applications for both advanced students and professionals
* Presents the strengths and weaknesses of molding processes

Micro and nano molding is a relatively new but fast growing field that is impacting industries that use plastic parts in their products. Micro/Nano Molding introduces the fundamentals and processes for micro and nano molding for plastic components. This book also covers applications, details, and examples.

Author's preface7
 
1. Introduction 10
 
1.1 Introduction 10
 
1.2 Micro/nano replication 12
 
1.3 Application fields of micro/nano replicated parts 15
 
1.4 Required technologies for micro/nano replication 19
 
2. Patterning technology for micro/nano mold fabrication 27
 
2.1 Material removal 27
 
2.1.1 Mechanical machining 27
 
2.1.2 Laser ablation 28
 
2.1.3 Silicon etching process 29
 
2.1.4 Focused ion beam pattering 30
 
2.2 Lithography process 31
 
2.2.1 Electron beam lithography 31
 
2.2.2 Photo lithography 32
 
2.2.3 Reflow method 32
 
2.2.4 Laser interference lithography 38
 
2.3 Electroforming processes 42
 
2.3.1 Theory of electroforming process 43
 
2.3.2 Electroforming results 43
 
3. Modification of mold surface properties 51
 
3.1 Introduction 51
 
3.2 Study of thiol-based self-assembled monolayer 52
 
3.2.1 Thiol-based self assembled monolayer and deposition process 52
 
3.2.2 Experiment results and analysis 53
 
3.2.3 The changing properties of SAM at actual replication environment 54
 
3.2.4 Analysis of replicated polymeric patterns 56
 
3.3 Silane-based self-assembled monolayer (SAM) for nano master 57
 
3.3.1 Silane-based self-assembled monolayer 57
 
3.3.2 Deposition process of silane-based self assembled monolayer 58
 
3.3.3 Self-assembled monolayer on polymer mold 59
 
3.3.4 Analysis of replicated polymeric patterns 60
 
3.4 Dimethyldichlorosilane self-assembled monolayer for metal mold 60
 
4. Micro/nano injection molding with an intelligent mold system 63
 
4.1 Introduction 63
 
4.2 Effects of the mold surface temperature on micro/nano injection molding 64
 
4.3 Theoretical analysis of passive/active heating methods for controlling the mold surface temperature 65
 
4.3.1 Mathematical modeling and simulation 66
 
4.3.2 Passive heating 71
 
4.3.3 Active heating 73
 
4.4. Fabrication and control of an active heating system using a MEMS heater and an RTD Sensor 75
 
4.4.1 Construction of an intelligent mold system 75
 
4.4.2 Control system for the intelligent mold system 77
 
4.4.2.1 Kalman filter observer of the thermal plant 79
 
4.4.2.2 LQGI controller 81
 
4.4.2.3 Performance of the constructed control system 84
 
5 Hot embossing of microstructured surfaces and thermal nano imprinting 89
 
5.1 Introduction 89
 
5.2 Development of micro-compression molding process 90
 
5.3 Temperature dependence of anti-adhesion between a mold and the polymer in thermal imprintingprocesses 92
 
5.3.1 Defects in imprintedmicro optical elements 93
 
5.3.2 Analysis of polymer in process condition of thermal imprinting 93
 
5.3.3 Analysis of replication quality fabricated in different peak temperature 95
 
5.4 Fabrication of a micro optics using micro-compression molding with a silicon mold insert 96
 
5.4.1 Fabrication of microlens components using Si mold insert 96
 
5.4.2 Analysis of refractive micro lens 97
 
5.5 Fabrication of a microlens array using micro-compression molding with an electroforming mold insert 98
 
5.5.1 Fabrication of microlens components using Ni mold insert 98
 
5.5.2 Analysis of Replication quality 99
 
5.6 Application of micro compression molding process 100
 
5.6.1 Fabrication of a microlens array using micro-compression molding 100
 
5.6.2 Fabrication of metallic nano mold and replication of nano patterned substrate for patterned media

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