Beschreibung:
Tai-Ran Hsu, PhD, is a Professor in the Department of Mechanical and Aerospace Engineering, San Jose State University, California. Dr. Hsu is the author of the earlier edition of this book, which is considered one of the bestselling textbooks on the subject of MEMS.
Aktuell und didaktisch ausgereift, bietet der Band Anwendern und fortgeschrittenen Studierenden einen ausgezeichneten Zugang zu den Themenbereichen MEMS und Mikrosysteme. Berücksichtigt werden sowohl Aspekte der Elektrik und Elektronik als auch die mechanische Seite der MEMS.
Technology/Engineering/Mechanical A bestselling MEMS text. now better than ever. An engineering design approach to Microelectromechanical Systems, MEMS and Microsystems remains the only available text to cover both the electrical and the mechanical aspects of the technology.
Preface.
Chapter 1: Overview of MEMS and Microsystems.
Problems.
Chapter 2: Working Principles of Microsystems.
Problems.
Chapter 3: Engineering Science for Microsystems Design and Fabrication.
Problems.
Chapter 4: Engineering Mechanics for Microsystems Design.
Problems.
Chapter 5: Thermofluid Engineering and Microsystems Design.
Problems.
Chapter 6: Scaling Laws in Miniaturization.
Problems.
Chapter 7: Materials for MEMS and Microsystems.
Problems.
Chapter 8: Microsystems Fabrication Processes.
Problems.
Chapter 9: Overview of Micromanufacturing.
Problems.
Chapter 10: Microsystem Design.
Problems.
Chapter 11: Assembly, Packaging and Testing of Microsystems.
Problems.
Chapter 12: Introduction to Nanoscale Engineering.
Problems.
Bibliography.
Index.
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