Scaling Issues and Design of MEMS

Salvatore Baglio, Associate Professor of Electronic Instrumentations and Measurements, University of Catania, Italy. Salvatore Baglio has co authored over 150 scientific publications and his research interests include nonlinear and chaotic dynamical systems, smart sensors, microsensors and Microsystems. Salvatore Castorina, Electrical and Electronic Measurements Group, University of Catania. Salvatore Castorina is co author of over 20 scientific papers and his research interests include micro and nano electromechanical systems, magnetic and thermal, micro sensors and micro actuators, micro and nano robotics. Luigi Fortuna , Professor of System Theory, University of Catania. Luigi Fortuna has published more than 280 technical papers and his interests include nonlinear science and complexity, chaos and cellular neural networks. Nicolò Savalli, Engineering Faculty, University of Catania. Nicolò Savalli teaches courses in Measurement Theory and Measurement Applications and is co author of more than 35 scientific publications. His research interests include micro electro mechanical systems (MEMS) and micro opto electro mechanical systems (MOEMS).

This accessible volume delivers a complete design methodology for microelectromechanical systems (MEMS). Focusing on the scaling of an autonomous micro-system, it explains the real-world problems and theoretical concepts of several different aspects inherent to the miniaturization of sensors and actuators. It reports on the analysis of dimensional scaling, the modelling, design and experimental characterization of a wide range of specific devices and applications, including:
 
* temperature microsensors based on an integrated complementary metal-oxide-semiconductor (CMOS) thermocouple;
* mechanical sensors;
* inductive microsensors for the detection of magnetic particles;
* electrostatic, thermal and magnetic actuators.
 

With an original approach, this informative text encompasses the entire range of themes currently at the forefront of MEMS, including an analysis of the importantissue of energy sources in MEMS. In addition, the book explores contemporary research into the design of complete MEMS with a case study on colonies of microbots.
 

Scaling Issues and Design of MEMS aims to improve the reader's basic knowledge on modelling issues of complex micro devices, and to encourage new thinking about scaling effects. It will provide support for practising engineers working within the defence industry and will also be of welcome interest to graduate students and researchers with a background in electronic engineering, physics, chemistry, biology and materials science.

The book has a broad appeal based upon an inter disciplinary and novel approach. The book s main idea of using a microrobot as a vehicle for a microsystem scaling study introduces the theoretical and conceptual aspect of this research, as well as the real world problems that have been encountered.

Preface.
 
Introduction.
 
1. Scaling of MEMS.
 
2. Scaling of Microactuators - an Overview.
 
3. Scaling of Thermal Sensors.
 
4. Inductive Sensors for Magnetic Fields.
 
5. Scaling of Mechanical Sensors.
 
6. Scaling of Energy Sources.
 
7. Technologies and Architectures for Autonomous MEMS Microrobots.
 
8. Moving towards the Nanoscale.
 
9. Examples of Scaling Effects Analysis - DIEES-MEMSLAB.
 
10. Concluding Remarks.
 
Index.

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