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Deep Implants: Fundamentals and Applications
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Artikel-Nr:
9780444596376
Veröffentl:
1989
Einband:
PDF
Seiten:
292
Autor:
G.G. Bentini
Serie:
ISSN
eBook Typ:
PDF
eBook Format:
PDF
Kopierschutz:
Adobe DRM [Hard-DRM]
Sprache:
Englisch
Beschreibung:
Deep implants are produced by the high-energy implantation of impurities in a host material. The thus created subsurface layers have properties that are different from the very surface and the bulk and show great promise for application in the electronics industry.
Deep implants are produced by the high-energy implantation of impurities in a host material. The thus created subsurface layers have properties that are different from the very surface and the bulk and show great promise for application in the electronics industry.