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Handbook of Silicon Semiconductor Metrology
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Artikel-Nr:
9780203904541
Veröffentl:
2001
Einband:
PDF
Seiten:
896
Autor:
Alain C. Diebold
eBook Typ:
PDF
eBook Format:
PDF
Kopierschutz:
Adobe DRM [Hard-DRM]
Sprache:
Englisch
Beschreibung:
Containing more than 300 equations and nearly 500 drawings, photographs, and micrographs,this reference surveys key areas such as optical measurements and in-line calibration methods. It describes cleanroom-based measurement technology used during the manufacture of silicon integrated circuits and covers model-based, critical dimension, overlay
Containing more than 300 equations and nearly 500 drawings, photographs, and micrographs,this reference surveys key areas such as optical measurements and in-line calibration methods. It describes cleanroom-based measurement technology used during the manufacture of silicon integrated circuits and covers model-based, critical dimension, overlay